Abstract: A pin-structure is an array of independent pins and possesses of hyper-adaptability for arbitrary shape replication. Currently, the researches on pin-structure designing have kept the ...
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Abstract: Aimed at increasing the yield rate of large-scale vertical-comb-driven tilt-tip (TT) micromirror array (MMA), this paper, for the first time, introduces double-SOI (D-SOI) and our previously ...
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